Effect of parameters on three-beam laser interference

Three-beam laser interference is used to create spot or grating patterns by three laser beams. In this paper, effect of parameters on three-beam laser interference is discussed. Computer simulation results have shown that the parameters and their deviations of incident angles, azimuthal angles and polarization states will affect the period, contrast, shape and direction of the spots of three-beam interference patterns. The patterns can be useful for the structuring of different surface patterns in three-beam laser interference lithography.