CMOS MAPS in a Homogeneous 3D Process for Charged Particle Tracking

This work presents the characterization of deep n-well (DNW) CMOS monolithic active pixel sensors (MAPS) fabricated in a 130 nm homogeneous, vertically integrated technology. An evaluation of the 3D MAPS device performance, designed for application of the experiments at the future high luminosity colliders, is provided through the characterization of the prototypes, including tests with infrared (IR) laser,
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Fe and
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Sr sources. The radiation hardness study of the technology will also be presented together with its impact on 3D DNW MAPS performance.