A hybrid ultrasonic squeeze film and magnetic levitation actuator for machine guideways

In this article we present a novel hybrid ultrasonic/magnetic levitation actuator for machine guideway applications. This arrangement is beneficial due to the repulsive and attractive forces of each physical phenomena. The combination simplifies guideway constructions significantly. Starting from analytical models of each effect, the self-stabilizing effect of the actuator is explained. In order to take advantage of the dynamic properties of the actuator, the position feedback of the ultrasonic transducer is shown. This enables the control of the levitation height as well as the bearing's damping and stiffness. The paper is concluded by an outlook to future applications of the novel hybrid actuator in machine guideways.