Characterization of SU-8 using terahertz time-domain spectroscopy

Among available materials for millimeter wave applications, SU-8 is one of the best choices due to its low dielectric losses and fine resolutions of UV-lithographic processing techniques. Of importance is that SU-8 can allow the generation of thick material layers (on the order of 500µm), making SU-8 very attractive for monolithic integration of mmWave on-chip interconnects and large bandwidth antennas post-chip production.