15-GHz flexible microwave thin-film transistors on plastic

We demonstrate microwave flexible thin-film transistors (TFTs) using transferrable single crystalline Si nanomembranes (NMs). By combining self-sustained strain techniques and strain compatible doping techniques, we realize a new speed record, f
_max
of 15 GHz, for flexible microwave TFTs based on Si. The TFTs exhibit superior mechanical flexibility. The demonstrations showed the great potential to further develop flexible microwave components and systems.