Electrical characteristics of helicon wave plasmas

The external electrical characteristics of helicon wave plasmas have been studied over a wide range of magnetic fields, radio frequency (RF) power, frequencies, and Ar gas pressures. External parameters, such as antenna voltage, current, and phase shifts, and internal parameters, such as electron density, are measured. The equivalent discharge resistance, reactance, and power transfer efficiency are calculated through these measurements. The characteristics of helicon mode is compared with inductively coupled plasma (ICP) and low mode. The power efficiency of the helicon mode is better than that of other modes. Consequently, electron density of helicon mode is much higher than that of other modes. This means the existence of a mechanism where electrons are very efficiently accelerated by the electric field of the antenna in the helicon mode. The power efficiency of helicon mode is higher at lower RF frequency and at optimum gas pressure than that of other modes.