Accurate SOI MOSFET characterization at microwave frequencies for device performance optimization and analog modeling

The maturation of low-cost silicon-on-insulator (SOI) MOSFET technology in the microwave domain has brought about a need to develop specific characterization techniques. An original scheme is presented, which, by combining careful design of probing and calibration structures, rigorous in situ calibration, and a new powerful direct extraction method, allows reliable identification of the parameters of the non-quasi-static (NQS) small-signal model for MOSFETs. The extracted model is shown to be valid up to 40 GHz.