Surface micro-machined high efficient and wideband cavity-backed patch antenna array for 60GHz radios

A wideband V-band cavity-backed circular patch antenna array is designed using a surface micromachining. The antenna array is excited by T-power divider. The T-power divider is designed using rectangular micro-coaxial transmission line. The antenna array with the specified size of 6.1mm×3mm×0.42mm and bandwidth shows around 10.3GHz (56.5~66.2GHz) under the condition of voltage standing wave ratio (VSWR) less than 2, which covers full-band standard of frequency range. Gain of the antenna array is up to 10.7 dBi gain at 61GHz, and the efficiency is 90%.