Dual-band metamaterial absorbers at terahertz frequency based on gold/parylene-C/silicide structure

We design, fabricate and characterize dual-band terahertz (THz) metamaterial absorbers with high absorption based on a structures consisting of a cobalt silicide (Co-Si) ground plane, a parylene-C dielectric spacer and a metal top layer. By combining two periodic metal resonators that couple separately within a single unit cell, a polarization-independent absorber with two distinct absorption peaks was obtained. By varying the thickness of the dielectric layer, we obtain absorptivity of 0.76 at 0.76THz and 0.97 at 2.30THz, which indicates the Co-Si ground plane absorbers present good performance.