Novel 200V power devices with large current capability and high reliability by inverted HV-well SOI technology

Novel 200V power devices, including the n-type lateral insulator gate bipolar transistor (nLIGBT), the n-type lateral extended drain MOS (nLEDMOS) and the p-type lateral extended drain MOS (pLEDMOS), have been fabricated by using the special 0.5μm inverted HV-well SOI technology. All the novel devices own larger current density, higher off-state breakdown voltage (BV) and better hot-carrier reliability comparing with the conventional devices. The improved devices have been successfully used for the plasma display panel (PDP) scan driver IC and reduce the chip size by 27%.