Modeling and fabrication of low cost MEMS varactor for filter applications

A low cost concept of a RF MEMS varactor for integration in a selectable-band patch filter is proposed, modeled and fabricated, with initially good results. A lumped element model is used to allow the simulation of the eletromechanical behavior of the MEMS varactor with the RF response of the patch filter. The first fabrication results show promising possibilities for the integration of the MEMS varactor (fabricated with microelectronics processing) and the patch filter (fabricated with printed circuit board technology) using a flip-chip process.