Iterative Learning Control of the electrostatic microbridge actuator

In this paper, we consider the control of an electrostatic microbridge actuator with a distributed electrostatic force input and distributed displacement sensing. A bounded desired trajectory is achieved by using an Iterative Learning Control (ILC) method based on discrete linear repetitive processes with the use of Linear Matrix Inequalities (LMI). Space and time discretization is accomplished by using a finite difference approach based on the so-called Crank-Nicolson method.