Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging

A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.