Assembly of a MEMS-based Wolter type-I X-ray optic toward a future planetary exploration mission

We have been developing original MEMS-based X-ray optics toward future astronomical missions such as a planetary exploration mission. In this paper, we report results on the first X-ray irradiation test for a 2-stage MEMS-based optic. The obtained FWHM of the focusing image is 13±2 arcmin. However, an occultation effect and a deformation accuracy possibly affect a reduction of effective area.