Influence of deposition and annealing parameters on phase-elemental composition of high entropy alloys nitrides (Ti-Zr-Hf-V-Nb)N

Using SEM (with EDS), RBS, XRD and μ-PIXE, the influence of deposition parameters changes of high entropy alloys nitrides, and following thermal annealing of them, on phase and elemental composition of (Ti-Zr-Hf-V-Nb)N coatings was investigated. Stability of atoms crystalline lattice of the coating, redistribution of elements after annealing, and changes (relaxation) of the internal microstrain was discovered.