Construction of an energy-saving semiconductor plant

NEC Corp. has constructed an energy-saving semiconductor plant incorporating various energy-saving techniques for its electric power supply, air conditioning system, and heat source, including a cogeneration system, clean room air heating through use of waste heat from equipment cooling water, and free cleaning, in order to actively promote energy saving in semiconductor production. The new plant has successfully achieved a 18% reduction in energy consumption from the level in the existing plants.