PHOMAG: a photolithography machine allocation game

In this paper, a computer simulation-based decision aid system is designed to serve as an interactive what-if analysis for dynamic allocation of photolithography machines in a fab. The system, PHOMAG, is featured by a full scale fab simulation model using ManSim/sup TM/, incorporation of interactive user-defined/dispatching decision in the simulator using UserAccess/sup TM/ and a user friendly GUI on PC/Windows95/sub TM/. PHOMAG has been implemented in the field with positive user feedback.