Emission-free distilled DIW closed system for ISO 14001

It is required that semiconductor factories generate "zero" industrial waste materials. Distillation systems are excellent from an emission-free stand point because they require no chemicals to purify the water and no periodical replacement of materials. We developed the first distilled deionized water (DIW) system for semiconductor manufacturing, and demonstrated the quality of distilled DIW for quarter micron device production. Then we designed a variety of an emission-free distilled DIW closed systems utilizing different processes, and investigated the costs of these systems.