High frequency longitudinal-transverse complex vibration systems for ultrasonic wire bonding

High frequency longitudinal to transverse complex vibration systems of 160 kHz to 1 MHz for ultrasonic wire ball bonding for IC or LSI are studied. Vibration systems of these high frequency and complex vibration welding equipments consist of transverse free-free complex vibration rod 7.0 mm in diameter, two longitudinal vibration systems for driving the transverse vibration rod and a ceramic capillary 1.5875 mm in diameter. Vibration distribution of capillary at high frequency up to 1 MHz is measured at the first time and the conventional capillary is revealed applicable at such high frequencies.