A novel PLL-based phase control technique in the digitalized closed-loop gyroscope interface circuit

This paper presents a novel phase control technique based on the charge-pump PLL in an analog-digital-combined closed-loop interface circuit. The phase control resolution is 0.004° with the control range of 85~95° under worst case. The interface circuit achieves the resolution of 2.38aF with a maximum equivalent sensitivity of 98.9mV/aF in simulation. The chip is being fabricated in a 0.18um CMOS process and is 3×1.8mm
²
in size.