Electrostatic microactuators in a flexible sheet — Smart MEMS sheet #2

We have successfully fabricated electrostatic microactuators in a flexible sheet (i.e. microactuators made of the flexible sheet). In this fabrication, we used Kapton
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sheets (DU PONT-TORAY) of 25μm thick as the flexible (structural) material, one mask and one additional shadow-mask to form comb-drive electrostatic microactuators in the sheet. As the first result, we could obtain the lateral displacement of 1μm to 14μm with applied voltage from 20V to 120V. We also could drive the actuators in the sheet fixed on a curved surface.