Improved MEMS-in-TEM setup for high sensitivity thermal characterization of nanowire using a new TEM cryo-holder

Thermal conductivity of diamond-like-carbon nanowire is investigated by combining MEMS in TEM (transmission electron microscope) with a new cryogenic TEM holder allowing in-situ electrical measurements from 90K to 380K. A suspended DLC nanowire of 80nm in diameter and 10mic in length was locally grown by FIB-CVD in between an integrated micro-heater and a temperature sensor. Combined with a special Wheastone bridge configuration, we show drastic improvement of temperature detection on the sensor and estimate the thermal conductance of the DLC nanowire at low temperature in-situ in TEM.