Printed micro-hotplates on flexible substrates for gas sensing

We report on the design, fabrication and characterization of polymeric printed micro-hotplates for gas sensing applications. The micro-hotplates sensing platforms have been realized by inkjet-printing. The silver nanoparticles-based heater and the interdigitated electrodes were both printed with a dielectric interlayer of laminated dry photoresist between them. The devices were completed with the deposition of a polyaniline sensing layer doped with polymeric acids, which when operated at 80°C, resulted in sensitive and reliable resistive ammonia sensor fabricated on flexible foil.