Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

We report an elastomer-based electrostatic microvalve that was fabricated using replica molding, micro-transfer printing, and plasma bonding. The microvalve can be actuated with an electric potential of ~ 220 V and can withstand pressures up to 3 kPa. Sixteen independently-operated valves were integrated on a single chip and operated with portable electronics.