180/spl times/180 element ultra-high frame rate burst image sensor

Design, fabrication, operation, performance and optical simulation results are presented for a 180/spl times/180 element ultra-high frame rate (UHFR) image sensor that can capture images at a frame rate of up to 2 million frames/sec. This imager has 92 /spl mu/m/spl times/92 /spl mu/m macropixels each consisting of a high-speed photodetector with 38% fill factor and 32 stages of frame storage memory.