A 0.13-$\mu$ m CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System

This paper presents the design of the interface circuit for a novel MEMS-based vacuum measurement system topology. The system is designed to target a vacuum range from 10 to 1200 mbar , providing a theoretical pressure resolution of 2 mbar over the temperature range from -10°C to 60°C. The proposed circuit is designed and fabricated in an IBM 0.13- μm CMOS process. Measurements show the circuit consumes 62 μW from a 1.2-V supply, and has a maximum response time of 2 ms. This work is a critical step towards the goal of building a low-power, monolithic, integrated MEMS-based temperature-compensated vacuum measurement system.