Single mask lateral tunneling accelerometer

A single-mask lateral tunneling accelerometer with integrated tip has been developed and characterized. High aspect ratio single-crystal silicon springs provide high resolution, wide operating bandwidth, and excellent isolation from off-axis stimuli. In this paper, we present the first such device implementing the SCREAM (1994) process technology. We focus on the advantages that this technology affords tunneling accelerometers and present a typical high-resolution accelerometer with 20 /spl mu/g/rt Hz performance at 100 Hz and 5.5 kHz resonant frequency.