A MEMS electromagnetic energy harvester using ultrasonic excitation

Energy harvesting remains a significant area of interest in current microelectromechanical systems (MEMS) research, with integrated microscale harvesters potentially being able to increase the running time of a range of electronic systems. This paper presents the design and characterization of an electromagnetic MEMS energy harvester that uses ultrasonic waves for mechanical excitation. A potential application for this concept is the charging of implanted biomedical devices via such micro-sized harvesters. The fabricated device is experimentally tested and characterized, with 0.06nW of electrical power being generated at the device's first resonance frequency of 41.3 kHz.