RF MEMS capacitor for microwave applications

Due to miniaturization and advantages offered, RF MEMS capacitors have recently been developed for utilization in microwave circuits, i.e., wireless communication applications such as filters, matching networks, and phase shifters among others. Throughout this presented work two-plate RF MEMS capacitor networks with two different number of membranes are presented. Both are designed with the same dimension of membrane and suspension. The measurement result shows resonant frequency and capacitance of each capacitor network indicated by impedances.