Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18 μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm
²
.