Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method

The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses.