Intrinsically Switchable Ferroelectric Contour Mode Resonators

This paper presents the design and measurement results of intrinsically switchable interdigitated contour mode resonators based on barium titanate (BTO) thin films. The resonators have lithographically defined interdigitated electrodes that determine their resonance frequencies. The BTO thin film exhibits electrostriction, which allows the resonances to be switched on and off. The highest frequency device exhibits series and parallel resonance frequencies of 1.67 and 1.68 GHz and quality factors of 178 and 152, respectively, with the application of a 10-V dc bias. Resonances are turned off by removing the dc bias. This is the first demonstration of an intrinsically switchable interdigitated ferroelectric contour mode resonator.