GDS2M: Preprocessing tool for MEMS devices

This paper proposes an effective software tool that extracts geometric information of Micro-Electro-Mechanical Systems (MEMS) or other integrated circuits (IC) devices, and exports it to data structures in MATLAB, aiding the electromagnetic modeling. The use of this preprocessing tool is illustrated for a capacitive RF shunt switch from the literature. Finally, this tool is included in the RF simulation flow of the switch and its validation consists of the comparison between the computed frequency characteristic and the results from the literature.