Relative film thickness and frequency dependency of mechanical stress in electrodes of SAW filters

Surface Acoustic Wave (SAW) filters are important frequency selective components in the front-end of many modern communication devices using wireless data transmission. As a result of device miniaturisation the acoustic power density in SAW filters increases, which has a non negligible, negative influence on their life time. To still ensure the required power durability the development of new power durable metallisations as well as power durability improvement due to optimisation of filter design is the central point of current investigations. In this work the impact of design parameters on power durability of SAW devices was determined by experiment. These dependencies were investigated using results of stress simulations in electrodes to describe loading conditions of power durability measurements.