cMUT probe cooling design by thermal network

A cooling system for the cMUT (Capacitance Micro machined Ultrasonic Transducer) probe is designed in efficient way and realized. First, cMUT specific thermal spreader is optimally designed to transport the heat load from the heat source to the heat pipe. Small fins with micro fans for the heat sinks are thermally linked with the heat pipe. Experiments are performed to evaluate the thermal resistances of the each component. Finally, the desired thermal resistance of the heat sink is estimated by using the thermal network analysis, which is realized with the air fans and the fins.