Maintaining abatement efficiency while increasing utility efficiency using the applied iSYS™ controller

Due to the particular nature of the semiconductor industry's process conditions and chemistries, pumps and abatement are an integral subset of the required manufacturing support structure. Each support component has an associated cost, utility consumption, and environmental impact. The Applied iSYS™ Controller has the ability to communicate with the process tool and send signals to the support equipment to adjust utilities consumption based on the process tool requirements and its emissions. The iSYS Controller moderates utilities consumption when the energy savings feature is enabled. If disabled or disconnected, the support equipment reverts to standard operation.