Design and optimization of reconfigurable reflectarray element with MEMS phase shifter

The design and optimization process of reconfigurable reflectarray element with MEMS-based phase shifter at 120 GHz is presented. The dielectric properties of SU-8 substrate are characterized with on-wafer measurements. Several design parameters which affect the element efficiency are studied. Through proper design and optimization of the array element the reasonable element efficiency can be achieved by utilizing SU-8 photoresist as its substrate.