Ferroelectric thin-film characterization through use of coplanar waveguide varactors

This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba
_0.6
Sr
_0.4
TiO
₃
, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.