Improvement of polynorbornene waveguide based O/E module performance with microlens structure

The Optoelectronic (O/E) module with polymer waveguides is one of necessary items in order to realize optical interconnection technology. Generally, the optical coupling loss of O/E modules results from the gap between polymer waveguides and O/E devices mounted on electrical substrate. Reduction of the optical coupling loss is an important challenge because the coupling loss is contributory to increment of power consumption of O/E modules. In order to decrease the optical coupling loss, we propose polymer waveguides with lens structure for O/E module and its fabrication process. We report that optical loss was less than 3dB with lens structure.