Design and simulation of micro-pump, micro-valve and micro-needle for biomedical applications

In this paper we have addressed the various aspects of design and simulation of MEMS based micro-pump, microvalve and micro-needles. Operating frequency and flow rate of the piezoelectrically actuated micro-pump was calculated using data from simulations. The PDMS flap based micro-valve operates like a microfluidic diode and prevents back flow of fluid. The silicon micro-needles can be used to deliver drugs into the patient's body and sample body fluids. These devices can be utilized to develop an automatic drug delivery system that has potential use in the healthcare sector.