A 0.25 /spl mu/m CMOS SOI technology and its application to 4 Mb SRAM

In this paper a 0.25 /spl mu/m SOI CMOS technology is described. It uses undepleted SOI devices with nominal channel length of 0.15 /spl mu/m, minimum channel length in the 0.1 /spl mu/m range, supply voltage of 1.8 V, local interconnect, 6 levels of metal, and same ground rules as the comparable bulk 0.25 /spl mu/m CMOS. Key technology elements considered include device, performance, reliability, ESD, and circuit functionality. Using this SOI CMOS, a 4 Mb SRAM is demonstrated. This is the highest performance 0.25 /spl mu/m CMOS technology reported to date.