A terahertz micromachined on-wafer probe for WR-1.2 waveguide

A micromachined on-wafer probe designed for WR-1.2 rectangular waveguide is demonstrated in this paper to further enable submillimeter-wave integrated circuits testing. Initial measurements of a prototype WR-1.2 micromachined on-wafer probe exhibit an insertion loss better than 9 dB for the lower half of the WR-1.2 band.