Study on characteristics of thermal flow sensor designed by different shape model

The present paper is focused on the characteristics study of thermal flow sensors in different shapes. Based on the thermal flow sensor design theory, a series of thermal flow sensors with different shapes were developed. Compared with the existing model, the sensitivity of the curve design was also studied through thermal analysis. The results reveal different temperature distributions in different design models. The finite element method (FEM) was also adopted to study thermal distribution of micro-electro mechanical systems (MEMS) sensor, and the result is in great agreement with that of numerical method.