MEMS for TPMS and exhaust of automobiles

In this paper, MEMS devices for TPMS and exhaust monitoring of automobiles are investigated. To counteract to EURO6 regulation, particulate matter sensor for detecting DPF failure of diesel engine as well as accelerometers for calibrating centrifugal effect on pressure measurement and secondary energy harvesting device will have strong effect for car safety. Heater embedded PM sensor uses electro dynamic principle and achieves resolution of 0.25mg/km. The accelerometer for TPMS application focuses on simplicity and low cost using piezoresistive beams and anodic bonding. Electrostatic energy harvester uses only 3 masks and shows symmetrical output of up to 0.73uW/cm
³
.