Two-chip MEMS capacitive microphone with CMOS analog amplifier

In this paper, we performed to develop two-chip MEMS capacitive microphone with CMOS analog amplifier. At first, we carried out multi-physics simulation to optimize the cutoff frequency and sensitivity of the designed MEMS microphone. Then MEMS microphone and CMOS analog preamplifier was fabricated and integrated. The acoustic sensitivity of developed MEMS microphone was measured with -41.3 dB.