Active thermal compensation of MEMS based gyroscope

This paper presents a new thermal compensation system for low temperature-bias-drift (TBD) MEMS based gyroscope. The temperature-dependent characteristics of proposed micro-gyroscope are firstly investigated and discussed in this work. The absolute temperature of the gyroscope is obtained by the frequency synthesizer, which is implemented by field programmable gate array (FPGA), in the thermal compensation system. Besides, the digital trimming mechanism, which implemented in CMOS readout ASIC, is actively tuned by the frequency synthesizer such that the temperature-bias-drift of gyrosocpe can be compensated. The experimental results shows that the temperature resolution of thermal compensation system is about 0.2° and the TBD of the uncompensated and compensated gyroscope is about 0.47 DPS/° and ±0.02 DPS/°.