Resonance Switchable Metamaterials Using MEMS Fabrications

This paper reports a switchable metamaterial working at terahertz (THz) regime, which is realized by using MEMS fabrications. The resonance induced by 2.60-THz incidence is switched by reconfiguring the metamaterial element, which is analyzed using the coupled oscillators model. The resonance switching of the metamaterial has potential applications, such as optical switching, tunable filtering, THz sensing, etc.