Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

In this contribution we present a fast and robust adaptive Fresnel mirror for advanced nanomachining applications with femtosecond lasers. The Fresnel mirror consists of two mirror segments that are actuated with a piezoelectric bimorph. All components are fabricated by low-cost rapid prototyping processes without the need for a clean-room. Light propagation and pulse transfer have been characterized as well as the static and dynamic actuation properties.