Analysis of out-of-plane Micro-Power Generators

Out-of-plane Micro-Power Generators (MPG) are investigated to identify their optimal design and operating conditions. Those MPGs employ a variable capacitor, an electret layer embedded between its electrodes, and an inertial mass carried by a movable electrode. Using a linear model, we study the impact of varying the capacitor gap, load resistance, and electret voltage on the output power. In addition, we analyze the effect of squeeze-film damping on the MPG performance. We find that the linear model breaks down as the excitation level increases. A nonlinear model is developed to capture the MPG response and estimate its output power in closed-form.