Two-dimensional arrays of microwavegenerated microplasmas

A two-dimensional array of microwave resonators is used to generate non-thermal microplasmas distributed over a planar area. Each resonator in the array is a stripline-like transmission line, 1/4 of a wavelength long at the resonant frequency, that generates a microplasma at its un-terminated end. The array can be powered using a single microwave supply, with elements efficiently sharing power via resonant coupling¹. Typical frequencies range from 0.5-2.5 GHz.